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CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment is sponsored by National Institute of Standards and Technology (NIST), Department of Commerce. This program, part of the CHIPS Act, seeks applications for projects involving the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment.
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Or search similar grants →Extracted from the official opportunity page/RFP to help you evaluate fit faster.
https://www. nist. gov/chips/chips-incentives-funding-opportunities The CHIPS Act provided $52.
7 billion to revitalize the domestic semiconductor industry. Of that sum, the CHIPS Program Office within the U.S. Department of Commerce is responsible for administering $39 billion in semiconductor incentives.
The CHIPS Act sets forth multiple dimensions of this overriding objective: Strengthening the security and resilience of the semiconductor supply chain, including by mitigating gaps and vulnerabilities Providing a supply of secure semiconductors relevant for national security Strengthening the leadership of the United States in semiconductor technology Growing the economy of the United States and supporting job creation in the United States Bolstering the semiconductor and skilled technical workforces in the United States February 28, 2023: Notice of Funding Opportunity: Commercial Fabrication Facilities June 23, 2023 : Widened the scope of this funding opportunity to seek applications for the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment for which the capital investment equals or exceeds $300 million.
This funding opportunity closed on June 18, 2024. September 30, 2023: Notice of Funding Opportunity: Facilities for Semiconductor Materials and Manufacturing October 16, 2025: Reopened and amended this NOFO. Concept plans from all eligible applicants are now being accepted through November 1, 2026.
Below you will also find links to helpful resources. Please note that the CHIPS Program Office may update guides and templates, as applicable, to address newly eligible potential applicants. For more application-related questions, please email apply [at] chips.
gov (apply[at]chips[dot]gov) . For general inquiries, email askchips [at] chips. gov (askchips[at]chips[dot]gov) .
Financial Model Template Instructions Amended NOFO 2 Frequently Asked Questions Handling of Confidential Information Created September 28, 2023, Updated October 16, 2025
According to the current listing, eligibility includes: An applicant must be a “covered entity,” which includes nonprofit entities, private-sector entities, consortiums of private-sector entities, or consortiums of nonprofit, public, and private-sector entities with a demons…. Confirm the full requirements in the official notice before applying.
The current listing shows not specified (Award Ceiling/Floor listed as $0, but general CHIPS Act funding is substantial). Verify award ceilings, matching requirements, and allowable costs in the official notice.
Applications for CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment are due November 1, 2026. Build your timeline backwards from this date to cover registrations, approvals, and final submission checks.
CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment is funded by National Institute of Standards and Technology (NIST), Department of Commerce. Verify program details on the funder's official page before applying.
Start from the official opportunity page linked in this listing — it carries the sponsor's submission instructions.
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